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Publications & Patents

R&D Cluster Tool SAF: Simple, Adjustable, Flexible (NEVAC day 2017, abstract)

 

Low-density composite powder for lightweight parts made by means powder metallurgy (World PM2016, poster)

 

R&D cluster tool SAF for vacuum deposition (24NDVaK)

 

Electrochromic properties of WO3 thin films sputtered with HiPIMS (IME-12)

 

HiPIMS Deposition of Tungsten Trioxide Thin Films (IME-12, poster)

 

Influence of magnetron sputtering spent energy on the cooper and stainless steel films thickness deposited on ceramic hollow spheres for syntactic foam composites production (SVC poster)

 

Vacuum technologies as a solution to energy problems; future trends ( Euro-Nano Forum poster)

 

Applying Co-Sputtering to Increase DDR During Deposition of Titanium Oxides and Silicon Oxides (SVC presentation)

 

Dynamic deposition rate increase of TiO2 thin films using serial reactive magnetron co-sputtering for industrial applications 


Titanium oxide reactive magnetron deposition process using Pulsed DC power supply 

 

Vorrichtung zur Vakuumbeschichtung durch Metall- oder Legierungsverdampfung und Verfahren mit derartiger Vorrichtung, DE112005001190B4 

 

Processes Control for Oxide Layer Deposition in Roll-to-Roll Vacuum Machines

 

HIPIMS Power Supply Utilization for Indium-Tin Oxide Coating Deposition on Roll Polymeric Substrates

Control of reactive deposition process by stabilization of the power supply work

 

3D numerical study of different magnet systems to reduce cross corner effect in rectangular magnetron sputtering

 

Deposition of ZnO:Al transparent conductive layers on polymer substrate by magnetron sputtering 

 

Highly productive apparatus for vacuum coating roll substrates, WO2010090504

 

Usage of magnetron pulse DC power supplies for various vacuum technological processes

 

Research of electrical, optical and structural characteristics of Ga-doped ZnO coatings received by magnetron sputtering on a polymeric substrate

 

Resistive evaporator, WO20090000720

 

New Vacuum Equipment for Multilayer Coating Deposition on Large Area Glass

 

Wire Fed Evaporation of Copper from Refractory Metal Boats 

 

Improvement of Web Thermal Conditions by the Deposition Drum Design

 

Method and apparatus for vacuum deposition by vaporizing metals and metal alloys, WO2005116290

 

Processes of coating powder materials 

 

Device and method for coating roll substrates in vacuum, WO2005001157

 

Vacuum equipment for TCO and AR coatings 


Control of transparent conductive and antireflection coating deposition 

 

Recent developments in the deposition of ITO and AR coatings 

 

Web coating with Lithium

 

Progress in vacuum-deposited Lithium metal anode structures 

 

Principles of in-line systems designing 

 

Protective properties of Silicone Nitride 

 

Zinc and Magnesium vapor generators 

 

Research of processes and devices for plasma treatment of polymeric films

 

Vacuum coating of porous and elastomeric substrate materials

 

Deposition of coatings or free foils of sublimating metals

 

Peculiarities of titanium compound films formation

 

Electric arc vaporization of complex alloys 

 

High corrosion resistant reflective coatings 

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