Publications & Patents
R&D Cluster Tool SAF: Simple, Adjustable, Flexible (NEVAC day, abstract)
R&D cluster tool SAF for vacuum deposition (24NDVaK)
Electrochromic properties of WO3 thin films sputtered with HiPIMS (IME-12)
HiPIMS Deposition of Tungsten Trioxide Thin Films (IME-12, poster)
Vacuum technologies as a solution to energy problems; future trends ( Euro-Nano Forum poster)
Titanium oxide reactive magnetron deposition process using Pulsed DC power supply
Processes Control for Oxide Layer Deposition in Roll-to-Roll Vacuum Machines
HIPIMS Power Supply Utilization for Indium-Tin Oxide Coating Deposition on Roll Polymeric Substrates
Control of reactive deposition process by stabilization of the power supply work
Deposition of ZnO:Al transparent conductive layers on polymer substrate by magnetron sputtering
Highly productive apparatus for vacuum coating roll substrates, WO2010090504
Usage of magnetron pulse DC power supplies for various vacuum technological processes
Resistive evaporator, WO20090000720
New Vacuum Equipment for Multilayer Coating Deposition on Large Area Glass
Wire Fed Evaporation of Copper from Refractory Metal Boats
Improvement of Web Thermal Conditions by the Deposition Drum Design
Method and apparatus for vacuum deposition by vaporizing metals and metal alloys, WO2005116290
Processes of coating powder materials
Device and method for coating roll substrates in vacuum, WO2005001157
Vacuum equipment for TCO and AR coatings
Control of transparent conductive and antireflection coating deposition
Recent developments in the deposition of ITO and AR coatings
Progress in vacuum-deposited Lithium metal anode structures
Principles of in-line systems designing
Protective properties of Silicone Nitride
Zinc and Magnesium vapor generators
Research of processes and devices for plasma treatment of polymeric films
Vacuum coating of porous and elastomeric substrate materials
Deposition of coatings or free foils of sublimating metals
Peculiarities of titanium compound films formation
Electric arc vaporization of complex alloys